LIU WEI. Comparison of Low-Energy X-RAY Thickness Measuring Device and β-RAY Thickness Measuring Device Applied to Film Manufacture. [J]. Power capacitor & reactive power compensation, 2001, (3): 36-38.
LIU WEI. Comparison of Low-Energy X-RAY Thickness Measuring Device and β-RAY Thickness Measuring Device Applied to Film Manufacture. [J]. Power capacitor & reactive power compensation, 2001, (3): 36-38.DOI:
Comparison of Low-Energy X-RAY Thickness Measuring Device and β-RAY Thickness Measuring Device Applied to Film Manufacture
Difference between low energy X RAY thickness measuring device and β RAY thickness measuring device used in film manufacture is analysed. It is pointed out that the low energy X RAY device will gradually replace the β RAY one
and become an essential model for film thickness measurement in years to come.
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Related Author
TAO Mei~2
CAI Jin-cun~1
CAI Fu-qiang~1
JIANG Jun-xiang~1
HOU Ming~2
HOU Xing-yu~1
YANG Rui-xing~1
FU Hao~1
Related Institution
Zhejiang WISCON Electric Co Ltd.
The State Power Ministry Power Capacitor Quality Test Centre
安徽230022
College of Electrical Engineering and Information Technology, Sichuan University